Paper Titles

Corrosion Depth Profiles by Rutherford Backscattering Spectrometry and Synchrotron X-Ray Reflrectometry
p.365

Hydrogen Elastic Recoil Detection Depth Resolution and Sensitivity as a Function of Sample Composition
p.369

Investigation of the Morphology of Porous Silicon by Rutherford Backscattering Spectrometry
p.373

Combining RBS and FTIR Spectroscopy for the Ge Analysis in Si_1-xGe_x Single Crystals
p.377

Hydrogen and Nitrogen Loss during ERD Analysis of Siliicon (Oxy)nitrides
p.381

Composition and Structural Evolution of Al-Me Alloys (Me = Fe, Cu, Sb) Prepared by Means of Ultrarapid Quenching from the Melt Studied by RBS Technique
p.385

Diffusion of Water into Quartz and Silica Glass
p.389

Lattice Location of Hf in Near-Stoichiometric LiNbO₃: RBS/Channeling and PAC Studies
p.395

(1 - 3) MeV / amu Heavy Ion Irradiaiton Effects on Optical Properties of Al₂O₃
p.399

HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Hydrogen and Nitrogen Loss during ERD Analysis of...

Hydrogen and Nitrogen Loss during ERD Analysis of Siliicon (Oxy)nitrides

Article Preview

Abstract:

You might also be interested in these eBooks

Materials Science Applications of Ion Beam Techniques

Info:

Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

381-384

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.381

Citation:

Cite this paper

Online since:

May 1997

Authors:

S.G. Wallace, A.C. Kockelkoren, M.G. Boudreau, Peter Mascher, J.S. Forster, J.A. Davies

Keywords:

Damage, Elastic Recoil Detection, Hydrogen, Loss, Release Cross Section, Silicon

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1997 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: