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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Combining RBS and FTIR Spectroscopy for the Ge...

Combining RBS and FTIR Spectroscopy for the Ge Analysis in Si_1-xGe_x Single Crystals

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

377-380

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.377

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Online since:

May 1997

Authors:

A. Gerhardt, J. Donecker, B. Selle, Jürgen Wollweber

Keywords:

Element Analysis, FTIR Spectroscopy, RBS, Si_1-xGe_x

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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