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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Ion Beam Analysis with Monolayer Depth Resolution

Ion Beam Analysis with Monolayer Depth Resolution

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

459-466

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.459

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Online since:

May 1997

Authors:

H.D. Carstanjen

Keywords:

Electrostatic Spectrometer, ERD of Hydrogen, ERD of Oxygen, High Depth Resolution, High Resolution ERD, High Resolution RBS, Ion Beam Analysis, Oxidation, Polymer Multilayer, X-Ray Mirror

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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