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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Highly Focused Ion Beams in Integrated Circuit...

Highly Focused Ion Beams in Integrated Circuit Testing

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

427-432

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.427

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Online since:

May 1997

Authors:

K.M. Horn, P.E. Dodd, B.L. Doyle

Keywords:

Ion Beam-Induced Charge Collection, Ion Microbeam, Radiation Testing, Single Event Upset

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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