Highly Focused Ion Beams in Integrated Circuit Testing

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 248-249)

Edited by:

A.G. Balogh and G. Walter

Pages:

427-432

DOI:

10.4028/www.scientific.net/MSF.248-249.427

Citation:

K.M. Horn et al., "Highly Focused Ion Beams in Integrated Circuit Testing", Materials Science Forum, Vols. 248-249, pp. 427-432, 1997

Online since:

May 1997

Export:

Price:

$35.00

In order to see related information, you need to Login.