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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Application of Highly Focused Ion Beams

Application of Highly Focused Ion Beams

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

445-450

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.445

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Online since:

May 1997

Authors:

L. Bischoff, J. Teichert

Keywords:

3D Structure, CoSi₂, Etch Stop, Focused Ion Beam (FIB), Ion Milling, Ion Optics, Liquid Metal Ion Source, Writing Implantation

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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