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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Effects of Hydrogen Plasma on Dislocation Motion...

Effects of Hydrogen Plasma on Dislocation Motion in Silicon

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

313-318

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.313

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Online since:

December 1997

Authors:

Y. Yamashita, F. Jyobe, Y. Kamiura, Koji Maeda

Keywords:

Dislocation, Glide Velocity, Hydrogen Plasma, Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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