Effects of Hydrogen Plasma on Dislocation Motion in Silicon

Abstract:

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Periodical:

Materials Science Forum (Volumes 258-263)

Edited by:

Gordon Davies and Maria Helena Nazaré

Pages:

313-318

DOI:

10.4028/www.scientific.net/MSF.258-263.313

Citation:

Y. Yamashita et al., "Effects of Hydrogen Plasma on Dislocation Motion in Silicon", Materials Science Forum, Vols. 258-263, pp. 313-318, 1997

Online since:

December 1997

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Price:

$35.00

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