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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Hydrogenation of Copper Related Deep States in...

Hydrogenation of Copper Related Deep States in n-Type Si Containing Extended Defects

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

319-324

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.319

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Online since:

December 1997

Authors:

J. Kaniewski, M. Kaniewska, L. Ornoch, Takashi Sekiguchi, Koji Sumino

Keywords:

Copper Related Deep States, DLTS, Extended Defects, Hydrogenation, Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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