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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Defects in AS-Grown Silicon and their Evolution...

Defects in AS-Grown Silicon and their Evolution During Heat Treatments

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

341-346

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.341

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Online since:

December 1997

Authors:

Jan Vanhellemont, E. Dornberger, J. Esfandyari, G. Kissinger, M.-A. Trauwaert, H. Bender, D. Gräf, U. Lambert, Wilfried von Ammon

Keywords:

Crystal Pulling, Czochralski Silicon, Grown-in Defects, Silicon Oxide Precipitates, Void

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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