An Investigation of the Possibility that Oxygen Diffusion in Czochralski Silicon is Catalyzed during Clustering

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 258-263)

Edited by:

Gordon Davies and Maria Helena Nazaré

Pages:

347-354

DOI:

10.4028/www.scientific.net/MSF.258-263.347

Citation:

S.A. McQuaid et al., "An Investigation of the Possibility that Oxygen Diffusion in Czochralski Silicon is Catalyzed during Clustering", Materials Science Forum, Vols. 258-263, pp. 347-354, 1997

Online since:

December 1997

Export:

Price:

$35.00

In order to see related information, you need to Login.