An Investigation of the Possibility that Oxygen Diffusion in Czochralski Silicon is Catalyzed during Clustering
p.347
p.347
Temperature-Dependent Widths of Infrared and Far-Infrared Absorption Lines of Oxygen in Silicon
p.355
p.355
The Oxygen Dimer in Silicon: Some Experimental Observations
p.361
p.361
Formation of Oxygen Dimers in Silicon during Electron-Irradiation Above 250 °C
p.367
p.367
High-Field EPR Spectroscopy of Thermal Donors in Silicon
p.373
p.373
Shallow Thermal Donors in Annealed CZ Silicon and Links to the NL10 EPR Spectrum: The Relevance of H, Al and N Impurities
p.379
p.379
Formation of Ultra Shallow Donors in Silicon by Long-Term-Annealing at 470 °C
p.385
p.385
Local Vibrational Modes of Weakly Bound O-H Complexes in SI
p.391
p.391
Phonon Scattering in Heat-Treated Cz-Silicon
p.399
p.399
High-Field EPR Spectroscopy of Thermal Donors in Silicon
Abstract:
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Periodical:
Materials Science Forum (Volumes 258-263)
Pages:
373-378
Citation:
Online since:
December 1997
Keywords:
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Сopyright:
© 1997 Trans Tech Publications Ltd. All Rights Reserved
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