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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Phonon Scattering in Heat-Treated Cz-Silicon

Phonon Scattering in Heat-Treated Cz-Silicon

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

399-404

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.399

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Online since:

December 1997

Authors:

F. Zeller, C. Wurster, K. Lassmann, W. Eisenmenger

Keywords:

Czochralski Silicon, Oxide Precipitates, Phonon Spectroscopy

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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