Shallow Thermal Donors in Annealed CZ Silicon and Links to the NL10 EPR Spectrum: The Relevance of H, Al and N Impurities

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Periodical:

Materials Science Forum (Volumes 258-263)

Edited by:

Gordon Davies and Maria Helena Nazaré

Pages:

379-384

DOI:

10.4028/www.scientific.net/MSF.258-263.379

Citation:

R.C. Newman et al., "Shallow Thermal Donors in Annealed CZ Silicon and Links to the NL10 EPR Spectrum: The Relevance of H, Al and N Impurities", Materials Science Forum, Vols. 258-263, pp. 379-384, 1997

Online since:

December 1997

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$35.00

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