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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Shallow Thermal Donors in Annealed CZ Silicon and...

Shallow Thermal Donors in Annealed CZ Silicon and Links to the NL10 EPR Spectrum: The Relevance of H, Al and N Impurities

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

379-384

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.379

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Online since:

December 1997

Authors:

R.C. Newman, M.J. Ashwin, R.E. Pritchard, J.H. Tucker, Edward C. Lightowlers, T. Gregorkiewicz, I.S. Zevenbergen, C.A.J. Ammerlaan, Robert J. Falster, M.J. Binns

Keywords:

Electron Paramagnetic Resonance (EPR), Infrared Absorption, Oxygen, Shallow Thermal Donors, Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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