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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Gas and Heat Treatment Effects on the Defect...

Gas and Heat Treatment Effects on the Defect Structure of a-SiC:H Films

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

709-714

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.709

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Online since:

December 1997

Authors:

T. Friessnegg, M. Boudreau, Peter Mascher, P.J. Simpson, Werner Puff

Keywords:

Defect, Gas Desorption, Positron Annihilation, Positronium, α-SiC:H

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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