Gas and Heat Treatment Effects on the Defect Structure of a-SiC:H Films

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Periodical:

Materials Science Forum (Volumes 258-263)

Edited by:

Gordon Davies and Maria Helena Nazaré

Pages:

709-714

DOI:

10.4028/www.scientific.net/MSF.258-263.709

Citation:

T. Friessnegg et al., "Gas and Heat Treatment Effects on the Defect Structure of a-SiC:H Films", Materials Science Forum, Vols. 258-263, pp. 709-714, 1997

Online since:

December 1997

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$35.00

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