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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Influence of Deposition Parameters on the...

Influence of Deposition Parameters on the Properties of Titanium Nitride Films Formed by Ion Beam Assisted Evaporation

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

499-502

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.499

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Online since:

August 1998

Authors:

D. Wolff, H. Oechsner

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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