In Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam Sputtering

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

493-496

DOI:

10.4028/www.scientific.net/MSF.287-288.493

Citation:

H. Hammer et al., "In Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam Sputtering", Materials Science Forum, Vols. 287-288, pp. 493-496, 1998

Online since:

August 1998

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$35.00

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