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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288In Situ Preparation of Metal, Metaloxide and...

In Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam Sputtering

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

493-496

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.493

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Online since:

August 1998

Authors:

H. Hammer, H. Busse, R. Kiefer

Keywords:

Auger Electron Spectroscopy (AES), Ion Beam Sputtering, Reactive Sputtering, Secondary Ion Mass Spectroscopy (SIMS)

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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