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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Texture Control of TiN Films Deposited by a Dual...

Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

497-498

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.497

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Online since:

August 1998

Authors:

M. Schafft, H. Oechsner

Keywords:

IBAD, Texture, TiN Film

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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