Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

497-498

DOI:

10.4028/www.scientific.net/MSF.287-288.497

Citation:

M. Schafft and H. Oechsner, "Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD", Materials Science Forum, Vols. 287-288, pp. 497-498, 1998

Online since:

August 1998

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