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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Fractal Analysis of Island Structures of Al Thin...

Fractal Analysis of Island Structures of Al Thin Films

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

479-482

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.479

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Online since:

August 1998

Authors:

E. Kusano, Y. Kuroda, A. Satoh, M. Kitagawa, H. Nanto, A. Kinbara

Keywords:

Al Thin Film, Fractal Analysis, Island Structure, Sputtering

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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