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HomeMaterials Science ForumMaterials Science Forum Vols. 327-328Fabrication, Microstructure and Stress Effects in...

Fabrication, Microstructure and Stress Effects in Sputtered TiNi Thin Films

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Shape Memory Materials

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Periodical:

Materials Science Forum (Volumes 327-328)

Pages:

295-302

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.327-328.295

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Online since:

January 2000

Authors:

D.S. Grummon

Keywords:

Actuator, Micro-Electromechanical System (MEMS), Residual Stress, Shape Memory, Sputtering, Thin Film, TiNi

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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