Fabrication, Microstructure and Stress Effects in Sputtered TiNi Thin Films

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Periodical:

Materials Science Forum (Volumes 327-328)

Edited by:

Toshio Saburi

Pages:

295-302

Citation:

D.S. Grummon "Fabrication, Microstructure and Stress Effects in Sputtered TiNi Thin Films", Materials Science Forum, Vols. 327-328, pp. 295-302, 2000

Online since:

January 2000

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$38.00

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