Internal Stresses in Aluminium Interconnects

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Periodical:

Materials Science Forum (Volumes 347-349)

Edited by:

A.J. Böttger, R. Delhez and E.J. Mittemeijer

Pages:

556-561

Citation:

A. Saerens et al., "Internal Stresses in Aluminium Interconnects", Materials Science Forum, Vols. 347-349, pp. 556-561, 2000

Online since:

May 2000

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$38.00

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