Internal Stresses in Aluminium Interconnects

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 347-349)

Edited by:

A.J. Böttger, R. Delhez and E.J. Mittemeijer

Pages:

556-561

DOI:

10.4028/www.scientific.net/MSF.347-349.556

Citation:

A. Saerens et al., "Internal Stresses in Aluminium Interconnects", Materials Science Forum, Vols. 347-349, pp. 556-561, 2000

Online since:

May 2000

Export:

Price:

$35.00

In order to see related information, you need to Login.