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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Reduced Micropipe Density in Boule-Derived 6H-SiC...

Reduced Micropipe Density in Boule-Derived 6H-SiC Substrates via H Etching of Seed Crystals

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

399-402

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.399

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Online since:

April 2002

Authors:

Stephen E. Saddow, Troy Elkington, M.C.D. Smith

Keywords:

Boule, Bulk Growth, Hydrogen Etching, Seed Crystal

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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