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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Polytype Identification and Mapping in...

Polytype Identification and Mapping in Heteroepitaxial Growth of 3C on Atomically Flat 4H-SiC Mesas Using Synchrotron White-Beam X-Ray Topography

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

391-394

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.391

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Online since:

April 2002

Authors:

Michael Dudley, William M. Vetter, X. Huang, Philip G. Neudeck, J. Anthony Powell

Keywords:

3C-SiC, Atomically Flat Mesas, Heteroepitaxial Growth, Mismatch Strain, Polytype Mapping, Screw Dislocations, Synchrotron White-Beam X-Ray Topography (SWBXT)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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