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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Fabrication of α-SiC Heteroepitaxial Films by...

Fabrication of α-SiC Heteroepitaxial Films by YAG-PLAD Method

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

371-374

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.371

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Online since:

April 2002

Authors:

Hachizo Muto, Takeshi Kusumori

Keywords:

Heteroepitaxial Film, Pulsed-Laser Ablation, RHEED, X-Ray Diffraction (XRD), α-SiC

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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