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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Reaction Mechanism of the Carbonization Process by...

Reaction Mechanism of the Carbonization Process by Low-Energy Ion Subplantation

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

363-366

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.363

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Online since:

April 2002

Authors:

Nobuteru Tsubouchi, Akiyoshi Chayahara, Yoshiaki Mokuno, Atsushi Kinomura, Yuji Horino

Keywords:

Activation Energy, Carbonization, Low-Energy Ion Beam, Si (100), Subplantation

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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