Formation of Extremely Thin, Quasi-Single-Domain 3C-SiC Film on Resistively Heated On-Axis Si(001) Substrate Using Organo-Silane Buffer Layer

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

351-354

DOI:

10.4028/www.scientific.net/MSF.389-393.351

Citation:

H. Nakazawa and M. Suemitsu, "Formation of Extremely Thin, Quasi-Single-Domain 3C-SiC Film on Resistively Heated On-Axis Si(001) Substrate Using Organo-Silane Buffer Layer", Materials Science Forum, Vols. 389-393, pp. 351-354, 2002

Online since:

April 2002

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$35.00

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