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Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI
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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Improved SiCOI Structures Elaborated by...

Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

343-346

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.343

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Online since:

April 2002

Authors:

Thierry Chassagne, Gabriel Ferro, Huiyao Wang, Y. Stoimenos, Hervé Peyre, Sylvie Contreras, Jean Camassel, Yves Monteil, B. Ghyselen

Keywords:

Chemical Vapor Deposition (CVD), Heteroepitaxy, SiCOI, SOI

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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