Low-Temperature Preparation of α-SiC Epitaxial Films by Nd: YAG Pulsed-Laser Deposition

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

375-378

Citation:

T. Kusumori and H. Muto, "Low-Temperature Preparation of α-SiC Epitaxial Films by Nd: YAG Pulsed-Laser Deposition", Materials Science Forum, Vols. 389-393, pp. 375-378, 2002

Online since:

April 2002

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$38.00

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