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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Observation of Planar Defects in 2-inch SiC Wafer

Observation of Planar Defects in 2-inch SiC Wafer

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

79-82

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.79

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Online since:

April 2002

Authors:

Hideaki Tanaka, Taro Nishiguchi, Makato Sasaki, Shigehiro Nishino

Keywords:

Diameter Enlargement, Micropipe, Planar Defects, Sublimation, Temperature Gradient

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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