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HomeMaterials Science ForumMaterials Science Forum Vols. 404-407Stress Development in Ni/C-Multilayers on...

Stress Development in Ni/C-Multilayers on Si-Substrates with Increasing Period Number

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Residual Stresses VI, ECRS6

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Periodical:

Materials Science Forum (Volumes 404-407)

Pages:

797-802

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.404-407.797

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Online since:

August 2002

Authors:

Jürgen Schreiber, Valeri Melov, Reiner Dietsch

Keywords:

Intrinsic Stress, Ni/C Multilayer, Pulsed Laser Deposition (PLD), Reflectivity, X-Ray Diffraction (XRD), X-Ray Mirror

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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