A Quantitative Basis for Rocking Curve Measurement of Highly Oriented Polycrystalline Thin Films

H. Toraya; H. Hibino; Takashi Ida

doi:10.4028/www.scientific.net/MSF.443-444.145

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Single Reflection Method for Pole-Density Measurements Accounting for Secondary Extinction in Textured Films
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Small Angle X-Ray Scattering with Cobalt Radiation for Nanostructure Characterization of Fe-Based Specimen
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HomeMaterials Science ForumMaterials Science Forum Vols. 443-444A Quantitative Basis for Rocking Curve Measurement...

A Quantitative Basis for Rocking Curve Measurement of Highly Oriented Polycrystalline Thin Films

Abstract:

A quantitative basis for rocking curve measurements of preferentially oriented polycrystalline thin films is presented. The Gaussian function is used for modeling the preferred orientation of crystallites around the plane normal of the specimen surface. A theoretical rocking curve is fitted to the observed curve by the least-squares method, and the degree of preferred orientation, given in volume fraction, can be derived from a refined preferred orientation parameter of the distribution function even when the preferred orientation is very small. Uses of diffractometers equipped with parallel-beam optics and the integrated intensity rather than peak intensity are important for reliable rocking curve measurement.

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Periodical:

Materials Science Forum (Volumes 443-444)

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145-150

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.443-444.145

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Online since:

January 2004

Authors:

H. Toraya, H. Hibino, Takashi Ida

Keywords:

Polycrystalline Thin Films, Preferred Orientation, Rocking Curve Measurement

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References

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[3] H. Toraya, T. C. Huang and Y. Wu: J. Appl. Cryst. 26 (1993), p.774.

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[4] H. Toraya, H. Hibino, T. Ida and N. Kuwano (in preparation) Figure 5. Fitting result for RC of 002 reflection from highly oriented AlN thin film. Symbols are used as in Fig. 3. Intensity data were collected with LABX.

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