Hydrogen-Induced Degradation and Passivation of Ferroelectric SrBi2Ta2O9 Thin Films by Au Top Electrode

Hoon Sang Choi; Hyun Joo Sung; Seung Gun Seo; Yu Min Jang; Chang Sik Son; In Hoon Choi

doi:10.4028/www.scientific.net/MSF.449-452.485

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Hydrogen-Induced Degradation and Passivation of Ferroelectric SrBi₂Ta₂O₉ Thin Films by Au Top Electrode

Abstract:

We investigated the effects of hydrogen annealing process on ferroelectricity in SrBi₂Ta₂O₉(SBT) capacitors. The hydrogen-induced degradation of SBT capacitors was found after a hydrogen annealing process. The degraded properties could be recovered by re-crystallization annealing process in O₂ ambient for 30 min. In order to prevent the catalyst reaction of Pt electrode known as an origin of hydrogen-induced degradation, Au top electrode was used. It was confirmed that Au electrode effectively prevented capacitors from degrading during hydrogen process.

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Materials Science Forum (Volumes 449-452)

Pages:

485-488

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.449-452.485

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Online since:

March 2004

Authors:

Hoon Sang Choi, Hyun Joo Sung, Seung Gun Seo, Yu Min Jang, Chang Sik Son, In Hoon Choi

Keywords:

Catalyst Reaction, Ferroelectric Degradation , Hydrogen Annealing, MOD, SBT

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