Hydrogen-Induced Degradation and Passivation of Ferroelectric SrBi2Ta2O9 Thin Films by Au Top Electrode

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We investigated the effects of hydrogen annealing process on ferroelectricity in SrBi2Ta2O9(SBT) capacitors. The hydrogen-induced degradation of SBT capacitors was found after a hydrogen annealing process. The degraded properties could be recovered by re-crystallization annealing process in O2 ambient for 30 min. In order to prevent the catalyst reaction of Pt electrode known as an origin of hydrogen-induced degradation, Au top electrode was used. It was confirmed that Au electrode effectively prevented capacitors from degrading during hydrogen process.

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Periodical:

Materials Science Forum (Volumes 449-452)

Edited by:

S.-G. Kang and T. Kobayashi

Pages:

485-488

Citation:

H. S. Choi et al., "Hydrogen-Induced Degradation and Passivation of Ferroelectric SrBi2Ta2O9 Thin Films by Au Top Electrode", Materials Science Forum, Vols. 449-452, pp. 485-488, 2004

Online since:

March 2004

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$38.00

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