High Temperature Wear Properties of Multiphase Composite: The Role of Transfer Film
p.81
p.81
Properties Evaluation of Composites Including Cracked Ellipsoidal Inhomogeneity
p.85
p.85
Molecular Dynamics Simulation of Stress Induced Grain Boundary Migration during Nanoindentation Experiments
p.89
p.89
Influence of Biaxial Surface Stress on Mechanical Indenting Deformations
p.93
p.93
Molecular Dynamics Analysis of Structure and Intrinsic Stress in Amorphous Silicon Carbide Film with Deposition Process Parameters
p.97
p.97
Numerical Analysis on the Dissimilar Channel Angular Pressing by Multi-Pass Rolling
p.101
p.101
A Study on the Process Design of Cold-Forged Automobile Parts
p.105
p.105
Finite Element Method in Powdered Metal Compaction Processes
p.109
p.109
Modification of the Recrystallization Texture by Means of Cross Rolling in Ferritic Stainless Steel Sheets
p.113
p.113
Molecular Dynamics Analysis of Structure and Intrinsic Stress in Amorphous Silicon Carbide Film with Deposition Process Parameters
Abstract:
Amorphous silicon carbide (a-SiC) films were deposited using molecular dynamics simulations employing the Tersoff potential. The structure and intrinsic stress of a-SiC films changed dramatically with changes in such principal deposition process parameters as substrate temperature and incident energy. Changes in structure and intrinsic stress with deposition process parameters were analyzed.
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Periodical:
Materials Science Forum (Volumes 449-452)
Pages:
97-100
Citation:
Online since:
March 2004
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© 2004 Trans Tech Publications Ltd. All Rights Reserved
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