Electrical and Optical Behavior of Al2O3/Porous Silicon/Silicon Structures

Abstract:

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In this paper, a promising class of optical filters is introduced, based on Al2O3/PS/Si structure. The filters consist of thin layer of aluminium electrochemically oxidized in different aqueous solution, on porous silicon. The spectral sensitivity can be easily varied by Al2O3 thickness. This result is a consequence of refractive index variation of Al2O3 and PS layers, confirmed by ellipsometry measurements.

Info:

Periodical:

Edited by:

N.Gabouze

Pages:

213-219

DOI:

10.4028/www.scientific.net/MSF.609.213

Citation:

N. Gabouze and K. Ait-Hamouda, "Electrical and Optical Behavior of Al2O3/Porous Silicon/Silicon Structures", Materials Science Forum, Vol. 609, pp. 213-219, 2009

Online since:

January 2009

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$35.00

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