Electrical and Optical Behavior of Al2O3/Porous Silicon/Silicon Structures
In this paper, a promising class of optical filters is introduced, based on Al2O3/PS/Si structure. The filters consist of thin layer of aluminium electrochemically oxidized in different aqueous solution, on porous silicon. The spectral sensitivity can be easily varied by Al2O3 thickness. This result is a consequence of refractive index variation of Al2O3 and PS layers, confirmed by ellipsometry measurements.
N. Gabouze and K. Ait-Hamouda, "Electrical and Optical Behavior of Al2O3/Porous Silicon/Silicon Structures", Materials Science Forum, Vol. 609, pp. 213-219, 2009