TiO2, ZrO2 and titanium oxide in deficiency oxygen environment were used to modify the surface of biomedical NiTi stents. The coatings were prepared by vacuum deposition. The surface microstructures and characteristics, blood compatibility of the modified stents in simulated body fluids were assessed using scanning electron microscopy (SEM), hemolysis test, coagulation test and blood platelet adhesion test. The hemocompatiblity of the modified stents were all improved by layer coating. Enhancement of blood compatibility was believed to stem from the improved surface water affinity and hemolysis resistance of the layer, and titanium oxide in deficiency oxygen environment displayed better. This study indicated that layer coating was a promising effective modification method for improving the surface properties of biomedical NiTi alloy intravascular stents. As a coating materials，titanium oxide in deficiency oxygen environment was better than TiO2 and ZrO2.