Novel MEMS Fabry-Perot Interferometric Pressure Sensors

Abstract:

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A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.

Info:

Periodical:

Materials Science Forum (Volumes 638-642)

Main Theme:

Edited by:

T. Chandra, N. Wanderka, W. Reimers , M. Ionescu

Pages:

1009-1014

DOI:

10.4028/www.scientific.net/MSF.638-642.1009

Citation:

I. Padron et al., "Novel MEMS Fabry-Perot Interferometric Pressure Sensors", Materials Science Forum, Vols. 638-642, pp. 1009-1014, 2010

Online since:

January 2010

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Price:

$35.00

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