Novel MEMS Fabry-Perot Interferometric Pressure Sensors
A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.
T. Chandra, N. Wanderka, W. Reimers , M. Ionescu
I. Padron et al., "Novel MEMS Fabry-Perot Interferometric Pressure Sensors", Materials Science Forum, Vols. 638-642, pp. 1009-1014, 2010