Novel MEMS Fabry-Perot Interferometric Pressure Sensors

Ivan Padron; Anthony T. Fiory; Nuggehalli M. Ravindra

doi:10.4028/www.scientific.net/MSF.638-642.1009

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HomeMaterials Science ForumMaterials Science Forum Vols. 638-642Novel MEMS Fabry-Perot Interferometric Pressure...

Novel MEMS Fabry-Perot Interferometric Pressure Sensors

Abstract:

A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.

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Periodical:

Materials Science Forum (Volumes 638-642)

Pages:

1009-1014

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.638-642.1009

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Online since:

January 2010

Authors:

Ivan Padron, Anthony T. Fiory, Nuggehalli M. Ravindra

Keywords:

Diaphragm Based Sensor, Embossed Diaphragm, Fabry-Perot Interferometry, Pressure Sensor

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References

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