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Tribological Properties of Hydrogenated Amorphous Carbon (a-C:H) Films on Aluminium Alloy Substrate under Different Substrate Bias Voltages

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Abstract:

Hydrogenated amorphous carbon (a-C:H) films were deposited on aluminium alloy substrates by microwave electron cyclotron resonance chemical vapor deposition(ECR-PECVD) at different substrate pulse bias voltage. In order to enhance the interface bonding strength between the film and Al alloy substrate, a 50nm silicon film was firstly fabricated on aluminium alloy substrate by unbalanced magnetron sputtering. The fiction and wear properties of the a-C:H films were evaluated using a ball-on-disk tribometer in air at room temperature. The results showed that the tribological properties of the a-C:H films decreased with the substrate bias voltage increased from -150 to -1000V. The a-C:H films deposited at -150V bias voltage had the best wear resistance.

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Periodical:

Materials Science Forum (Volume 687)

Pages:

784-790

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.687.784

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Online since:

June 2011

Authors:

X. Gui, Y. Y. Su, S. Y. Li, J. Mei, H. Sun, Yong Xiang Leng, N. Huang

Keywords:

Aluminium Alloy, Bias Voltage, Hydrogenated Amorphous Carbon, Microwave Electron Cyclotron, Resonance Chemical Vapor Deposition, Tribological Property

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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