Gas Sensing Properties of ZnO Thin Film/Si Heterojunction to Alcohols

Xiao Yan Zhou; Ming Ma; Qing Zhong Xue

doi:10.4028/www.scientific.net/MSF.687.798

Paper Titles

Structural and Optical Properties of Zn_1-XCr_XO Thin Films Deposited by Magnetron Sputtering
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Structure and Magnetic Properties of CoFe₂O₄ Nanocrystal Thin Films Prepared by Sol-Gel Method
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Study on Tribological Performance of the TiNi Modified Layer on the Surface of the Ti6Al4V Alloy
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Synthesis of Porous TiO₂ Thin Films via Sol-Gel Method and their Phototocatalyst Performances
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The Microstructure, Resistivity and Infrared Emissivity of ITO Film with O/Ar Ratio Variation in Al₂O₃ Buffer Layer
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Transparency of Hybrid Films Based on (γ-Methacrylpropyl)- Trimethoxysilane and its Validation by Computing Energy-Band Structure
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Tribological Properties of Hydrogenated Amorphous Carbon (a-C:H) Films on Aluminium Alloy Substrate under Different Substrate Bias Voltages
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VO₂ Films by Polymer-Assisted Deposition: Investigation of Thermal Decomposition of Precursor Gel and Control of Phase Transition Temperatures
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Gas Sensing Properties of ZnO Thin Film/Si Heterojunction to Alcohols
p.798

HomeMaterials Science ForumMaterials Science Forum Vol. 687Gas Sensing Properties of ZnO Thin Film/Si...

Gas Sensing Properties of ZnO Thin Film/Si Heterojunction to Alcohols

Abstract:

The polycrystalline zinc oxide (ZnO) film was deposited on p-Si substrate by radio-frequency (RF) magnetron sputtering. The structure and morphology of the ZnO thin films are characterized by X-ray diffraction (XRD), the energy dispersive analysis of X-ray (EDX) and scanning electron microscope (SEM). The gas sensing properties of the ZnO/Si heterojunctions for alcohols with different chain lengths were investigated at room temperature. It is found that the current-voltage (I-V) characteristics of the ZnO/Si heterojunctions are sensitive to isopropanol, ethanol and methanol gas. We discussed a possible gas sensing mechanism of ZnO/Si heterojunction. The sensitivity of the ZnO/Si heterojunctions to the gases decreases from isopropanol to methanol and to ethanol at the same concentration. It can be explained by the volume effect and electron donating effect.

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Materials Science Forum (Volume 687)

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798-802

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https://doi.org/10.4028/www.scientific.net/MSF.687.798

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June 2011

Authors:

Xiao Yan Zhou, Ming Ma, Qing Zhong Xue

Keywords:

Alcohols, Electrical Properties, Sensor, Thin Film

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