Gas Sensing Properties of ZnO Thin Film/Si Heterojunction to Alcohols

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The polycrystalline zinc oxide (ZnO) film was deposited on p-Si substrate by radio-frequency (RF) magnetron sputtering. The structure and morphology of the ZnO thin films are characterized by X-ray diffraction (XRD), the energy dispersive analysis of X-ray (EDX) and scanning electron microscope (SEM). The gas sensing properties of the ZnO/Si heterojunctions for alcohols with different chain lengths were investigated at room temperature. It is found that the current-voltage (I-V) characteristics of the ZnO/Si heterojunctions are sensitive to isopropanol, ethanol and methanol gas. We discussed a possible gas sensing mechanism of ZnO/Si heterojunction. The sensitivity of the ZnO/Si heterojunctions to the gases decreases from isopropanol to methanol and to ethanol at the same concentration. It can be explained by the volume effect and electron donating effect.

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Periodical:

Edited by:

Chengming Li, Chengbao Jiang, Zhiyong Zhong and Yichun Zhou

Pages:

798-802

DOI:

10.4028/www.scientific.net/MSF.687.798

Citation:

X. Y. Zhou et al., "Gas Sensing Properties of ZnO Thin Film/Si Heterojunction to Alcohols", Materials Science Forum, Vol. 687, pp. 798-802, 2011

Online since:

June 2011

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$35.00

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