Study of Microstructures in Single Crystalline Chemical Vapor Deposited Diamond Thin Films

Abstract:

Homo-epitaxial (100) single crystal diamond films of different isotopic (13C) composition were synthesized by micro-wave plasma chemical vapor deposition (MPCVD). Undoped 12C (100) films were also synthesized at different thicknesses. The growth surface of 13C doped showed a sequential morphological change from flat surface to stepped or ledge surface and coarsening of the steps/ledges with the increase of 13C-isotope concentration. As the growth proceeds via surface steps/ledges and coarsening of these steps/ledges, further increase in imperfection of the grown CVD single crystal diamonds observed with the development of non-(100) orientations. In case of undoped 12C samples, as the thickness increased the in-grain misorientation got reduced.

• Periodical: Materials Science Forum (Volumes 702-703)
• Pages: 1015-1018
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.702-703.1015
• Online since: December 2011
• Authors: Lokendra Jain, D.R. Mohapatra, R. Bajpai, Ritwik Basu, D.S. Misra, Indradev Samajdar
• Keywords: Crystallographic Texture, CVD, Diamond Thin Film, EBSD, Misorientation

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DOI: 10.1016/s0040-6090(99)00528-3