Study of Microstructures in Single Crystalline Chemical Vapor Deposited Diamond Thin Films

Abstract:

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Homo-epitaxial (100) single crystal diamond films of different isotopic (13C) composition were synthesized by micro-wave plasma chemical vapor deposition (MPCVD). Undoped 12C (100) films were also synthesized at different thicknesses. The growth surface of 13C doped showed a sequential morphological change from flat surface to stepped or ledge surface and coarsening of the steps/ledges with the increase of 13C-isotope concentration. As the growth proceeds via surface steps/ledges and coarsening of these steps/ledges, further increase in imperfection of the grown CVD single crystal diamonds observed with the development of non-(100) orientations. In case of undoped 12C samples, as the thickness increased the in-grain misorientation got reduced.

Info:

Periodical:

Materials Science Forum (Volumes 702-703)

Edited by:

Asim Tewari, Satyam Suwas, Dinesh Srivastava, Indradev Samajdar and Arunansu Haldar

Pages:

1015-1018

DOI:

10.4028/www.scientific.net/MSF.702-703.1015

Citation:

L. Jain et al., "Study of Microstructures in Single Crystalline Chemical Vapor Deposited Diamond Thin Films", Materials Science Forum, Vols. 702-703, pp. 1015-1018, 2012

Online since:

December 2011

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$35.00

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