Study of Microstructures in Single Crystalline Chemical Vapor Deposited Diamond Thin Films
Homo-epitaxial (100) single crystal diamond films of different isotopic (13C) composition were synthesized by micro-wave plasma chemical vapor deposition (MPCVD). Undoped 12C (100) films were also synthesized at different thicknesses. The growth surface of 13C doped showed a sequential morphological change from flat surface to stepped or ledge surface and coarsening of the steps/ledges with the increase of 13C-isotope concentration. As the growth proceeds via surface steps/ledges and coarsening of these steps/ledges, further increase in imperfection of the grown CVD single crystal diamonds observed with the development of non-(100) orientations. In case of undoped 12C samples, as the thickness increased the in-grain misorientation got reduced.
Asim Tewari, Satyam Suwas, Dinesh Srivastava, Indradev Samajdar and Arunansu Haldar
L. Jain et al., "Study of Microstructures in Single Crystalline Chemical Vapor Deposited Diamond Thin Films", Materials Science Forum, Vols. 702-703, pp. 1015-1018, 2012