Numerical Simulation of the Effects of Different Coatings on Graphite Susceptor for the Induction Process of Polycrystalline Silicon

Abstract:

The vacuum induction melting and control solidification is a new developed process for the manufacture of polycrystalline silicon with the advantage of quick heating rate compared to the traditional resistance heating method. The graphite susceptor of the induction furnace plays a key role in controlling the temperature of the melt of polycrystal silicon for solar cells. This paper investigates how different coatings painted on the susceptor would influence the heating efficiency and the temperature distribution of the silicon melt. A graphite susceptor is usually coated with a thin film of insulating material to reduce heat losses and to prevent vapors such as SiO to contaminate the susceptor. Numerical simulations show that the coating material at the outer surface of the susceptor should be the one with low thermal conductivity to prevent heat loss. On the other hand, the coating on the inner surface should be the material with high thermal conductivity to allow easy heat transfer.

• Periodical: Materials Science Forum (Volumes 704-705)
• Pages: 948-953
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.704-705.948
• Online since: December 2011
• Authors: K.L. Lian, S.S. Lian, S. Tsao
• Keywords: Coating, Polycrystalline Silicon, Susceptor, Vacuum Induction Melting

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