Substrate Bias Dependent Microstructure and Properties of TC17 Titanium Alloy Coatings Deposited by Magnetron Sputtering

Ming Wu; Hao Huang; Hu Li; Kan Zhang; Mao Wen; Wei Tao Zheng

doi:10.4028/www.scientific.net/MSF.898.1388

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HomeMaterials Science ForumMaterials Science Forum Vol. 898Substrate Bias Dependent Microstructure and...

Substrate Bias Dependent Microstructure and Properties of TC17 Titanium Alloy Coatings Deposited by Magnetron Sputtering

Abstract:

While matrix coated fiber method is used to fabricate SiC continuous fiber reinforced TC17 (Ti-5Al-2Sn-2Zr-4Mo-4Cr) matrix composites (SiC_f_/TC17), the properties of SiC_f/TC17 composite are strongly affected by the microstructure and properties of TC17 alloy coatings in precursor wires. In this work, V_b(substrate bias) was adopted to tailor the microstructure and properties of TC17 coatings, and V_b dependent on microstructure, morphology, composition, stress, hardness and adhesion for TC17 coatings have been investigated by X-ray diffraction, scanning electron microscope, atomic force microscope, auger electron spectrometer, surface profiler and nanoindenter. The experimental results showed that all coatings crystallized with hexagonal structure (α-Ti). The migratory ability of incoming ions increased with increasing V_b from floating to-120V, and the smoothing growth surface and re-sputtering came into prominence with further increasing V_b, then the surface roughened again and accompanied by a transition of growth mode from column grains to compact-grain structures. As V_b increased, Al content increased while Ti content decreases. In addition, compressive stress and hardness showed a rising trend caused by ions implantation. Interface ions implantation and stress state acted together on the adhesive force between TC17 alloy coatings and SiC fiber.

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Materials Science Forum (Volume 898)

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1388-1396

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https://doi.org/10.4028/www.scientific.net/MSF.898.1388

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June 2017

Authors:

Ming Wu, Hao Huang, Hu Li, Kan Zhang, Mao Wen, Wei Tao Zheng

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Adhesive Force, Precursor Wire, Stress, Substrate Bias, TC17 Titanium Alloy

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