Technology of SMD MOX Gas Sensors Rapid Prototyping

Abstract:

This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.

• Periodical: Materials Science Forum (Volume 977)
• Pages: 231-237
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.977.231
• Online since: February 2020
• Authors: Nikolay Samotaev*, Konstantin Oblov, Denis Veselov, Boris Podlepetsky, Maya Etrekova, Nikolay Volkov, Nazar Zibilyuk
• Keywords: Ceramics, Gas Sensor, Laser Technology, Microheater, Surface-Mounted Device

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