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HomeSolid State PhenomenaSolid State Phenomena Vols. 121-123Design Research of Nanopositioner Based on SPM and...

Design Research of Nanopositioner Based on SPM and Its Simulation of FEM

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Nanoscience and Technology

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Periodical:

Solid State Phenomena (Volumes 121-123)

Pages:

1473-1478

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.121-123.1473

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Online since:

March 2007

Authors:

Z.Y. Zhang, Hong Qi Li, H.X. Zhou

Keywords:

Finite Element Model (FEM), Flexure Hinge, Kinematical Analysis, Nanopositioner, Piezoelectric Actuator, SPM

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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