Nano-Displacement Sensing and Estimation (nDSE): Enabling Technology for Nano Metrology and Fabrication

Jun Gao; Carl Picciotto

doi:10.4028/www.scientific.net/SSP.121-123.817

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HomeSolid State PhenomenaSolid State Phenomena Vols. 121-123Nano-Displacement Sensing and Estimation (nDSE):...

Nano-Displacement Sensing and Estimation (nDSE): Enabling Technology for Nano Metrology and Fabrication

Abstract:

In this paper, we will present theory for nDSE (nano-scale Displacement Sensing and Estimation) and its application framework: IDMA (Indirect Displacement-Measurement-based Alignment). nDSE presents a clear and novel theoretical explanation to displacement sensing and estimation, especially down to the nano scale, a precision traditionally thought difficult or impossible to achieve because the displacements are below the wavelength of light and smaller than the pixel dimensions of practical observation systems. IDMA is an enabling framework based on nDSE to provide a new, low-cost, high precision overlay alignment for the challenging issue of nano scale alignment and metrology.

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Periodical:

Solid State Phenomena (Volumes 121-123)

Pages:

817-822

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.121-123.817

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Online since:

March 2007

Authors:

Jun Gao, Carl Picciotto

Keywords:

Alignment, Displacement Estimation, Displacement Sensing, IDMA, Nano Metrology, Nano-Fabrication, Nanoimprint Lithography, N-Cubed Algorithm, nDSE, Overlay

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References

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