To find out suitable Si surface treatment and heat treatment conditions, acid treatment of Si wafer was done for lithium polysilicate electrolyte coating on Si wafer. In case of HCl treatment, the wet angle of a sample is 30o, which is the smallest wet angle of other acid in this experiment. Acid treatment time is 10 min, which is no more change of wet angle. Lithium polysilicate electrolyte was synthesized by hydrolysis and condensation of lithium silicate solution using perchloric acid. Thermal analysis of lithium polysilicate electrolyte shows the weight loss of ~23 % between 400 and 500 , which is due to the decomposition of LiClO4. The XRD patterns of the obtained lithium polysilicate electrolyte also show the decrement of LiClO4 peak at 400 . The optimum heat treatment temperature is below 400 , which is the suitable answer for lithium polysilicate electrolyte.