Piezoelectric Bimorph Microphone with Low Stress Parylene Diaphragm

Seung Hwan Yi; Man Soon Yoon; Soon Chul Ur

doi:10.4028/www.scientific.net/SSP.124-126.161

Paper Titles

Microstructures and Dielectric Properties of CaCu₃Ti₄O₁₂ Polycrystalline Ceramics
p.143

Embossing Lithography on Sticky Thermoset Polymer Using Ni Template
p.147

Effect of Source Supply Methods on Low-Temperature Preparation of Lead Zirconate Titanate Thin Films Using SrTiO₃ Seed Layers by Metallorganic Chemical Vapor Deposition
p.153

Removal of Slurry Residues in Tungsten Plug during Chemical Mechanical Planarization
p.157

Piezoelectric Bimorph Microphone with Low Stress Parylene Diaphragm
p.161

Stable Deposition and Patterning of Metal Layers on the PDMS Substrate and Characterization for the Development of the Flexible and Implantable Micro Electrode
p.165

Electrical Properties of Lead Zinc Niobate - Lead Zirconate Titanate Thick Films Formed by Aerosol Deposition Process
p.169

Materials Design with Enhanced Temperature Stability of Resonant Frequency for High Frequency Application
p.173

Epitaxial Growth and Anisotropic Dielectric Properties of La-Doped Bi₄Ti₃O₁₂ Thin Films
p.177

HomeSolid State PhenomenaSolid State Phenomena Vols. 124-126Piezoelectric Bimorph Microphone with Low Stress...

Piezoelectric Bimorph Microphone with Low Stress Parylene Diaphragm

Abstract:

This paper describes a micromachined piezoelectric bimorph microphone, which is built on a low stress Parylene diaphragm with high quality ZnO films. The ZnO thin film has fine grain with the average grain size less than 1 and the grain orientation is perpendicular to the substrate. The highest sensitivity of piezoelectric bimorph microphone fabricated in this study is about 0.74 mV/Pa, which is twice higher than that of an individual segmented electrode. Based upon the experimental results, we proposed the equivalent electrical circuit model of piezoelectric bimorph microphone.