Piezoelectric Bimorph Microphone with Low Stress Parylene Diaphragm

Abstract:

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This paper describes a micromachined piezoelectric bimorph microphone, which is built on a low stress Parylene diaphragm with high quality ZnO films. The ZnO thin film has fine grain with the average grain size less than 1  and the grain orientation is perpendicular to the substrate. The highest sensitivity of piezoelectric bimorph microphone fabricated in this study is about 0.74 mV/Pa, which is twice higher than that of an individual segmented electrode. Based upon the experimental results, we proposed the equivalent electrical circuit model of piezoelectric bimorph microphone.

Info:

Periodical:

Solid State Phenomena (Volumes 124-126)

Edited by:

Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park

Pages:

161-164

DOI:

10.4028/www.scientific.net/SSP.124-126.161

Citation:

S. H. Yi et al., "Piezoelectric Bimorph Microphone with Low Stress Parylene Diaphragm", Solid State Phenomena, Vols. 124-126, pp. 161-164, 2007

Online since:

June 2007

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Price:

$35.00

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