Case Study of Microelectrostatic Motor

Vytautas Bagdonas; Vytautas Ostasevicius

doi:10.4028/www.scientific.net/SSP.147-149.113

Paper Titles

Intelligent Live Environment Design with Assistive Robots for Vulnerable Persons
p.86

Localization of Mobile Robot Using Radio Waves
p.95

Agent-Component Design of Smart Appliances
p.101

Analysis of Polar Positioning System in Laser Device for Glass Engraving
p.107

Case Study of Microelectrostatic Motor
p.113

Design of Observer for Direct Current Drive
p.119

Field Determination and Calculation of Stiffness Parameters in an Active Magnetic Bearing (AMB)
p.125

High-Precision Gas Sensor Based on Photonic Bandgap Fiber Cell
p.131

Integrated Diagnostics of the Rotating System with an Active Magnetic Bearing
p.137

HomeSolid State PhenomenaSolid State Phenomena Vols. 147-149Case Study of Microelectrostatic Motor

Case Study of Microelectrostatic Motor

Abstract:

This article describes a sub-millimeter micromotor, one of achievements of MEMS (microelectromechanical systems) science that is driven by electrostatic force. A simplified analytical dynamical model for microelectrostatic motor is presented. The model involves formulas for calculation of non-fringing electrostatic field forces for any rotor and stator pole combination, for any number of poles. Both tangent and normal forces are derived. The article shows how to increase torque created by tangential force and how to decrease friction created by normal component. The model is useful for development of motor control system and further motor analysis. The analytical model is quantitatively compared to finite element model (FEM) created using Ansys and Matlab software. By changing the number of poles in both models, the ripple of the motor torque is researched using both methods.