Case Study of Microelectrostatic Motor

Abstract:

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This article describes a sub-millimeter micromotor, one of achievements of MEMS (microelectromechanical systems) science that is driven by electrostatic force. A simplified analytical dynamical model for microelectrostatic motor is presented. The model involves formulas for calculation of non-fringing electrostatic field forces for any rotor and stator pole combination, for any number of poles. Both tangent and normal forces are derived. The article shows how to increase torque created by tangential force and how to decrease friction created by normal component. The model is useful for development of motor control system and further motor analysis. The analytical model is quantitatively compared to finite element model (FEM) created using Ansys and Matlab software. By changing the number of poles in both models, the ripple of the motor torque is researched using both methods.

Info:

Periodical:

Solid State Phenomena (Volumes 147-149)

Edited by:

Zdzislaw Gosiewski and Zbigniew Kulesza

Pages:

113-118

DOI:

10.4028/www.scientific.net/SSP.147-149.113

Citation:

V. Bagdonas and V. Ostasevicius, "Case Study of Microelectrostatic Motor", Solid State Phenomena, Vols. 147-149, pp. 113-118, 2009

Online since:

January 2009

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Price:

$35.00

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