Investigation of the Mechanical Properties of Thin Films by Bulge Test
A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data.
M. Kittler and H. Richter
A. Hémel et al., "Investigation of the Mechanical Properties of Thin Films by Bulge Test", Solid State Phenomena, Vols. 156-158, pp. 477-482, 2010