Investigation of the Mechanical Properties of Thin Films by Bulge Test

Abstract:

A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data.

• Periodical: Solid State Phenomena (Volumes 156-158)
• Pages: 477-482
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.156-158.477
• Online since: October 2009
• Authors: Audrey Hémel, Alain Jacques, Thomas Schenk, Tomáš Kruml
• Keywords: Bulge Test, Mechanical Property, Thin Film

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