Investigation of the Mechanical Properties of Thin Films by Bulge Test

Abstract:

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A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data.

Info:

Periodical:

Solid State Phenomena (Volumes 156-158)

Edited by:

M. Kittler and H. Richter

Pages:

477-482

DOI:

10.4028/www.scientific.net/SSP.156-158.477

Citation:

A. Hémel et al., "Investigation of the Mechanical Properties of Thin Films by Bulge Test", Solid State Phenomena, Vols. 156-158, pp. 477-482, 2010

Online since:

October 2009

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Price:

$35.00

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