Gettering and Defect Engineering in Semiconductor Technology XIII

Gettering and Defect Engineering in Semiconductor Technology XIII

Subtitle:

GADEST 2009

Description:

This collection aims to address the fundamental aspects, as well as the technological problems, which are associated with defects in electronic materials and devices.

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Info:

Editors:
M. Kittler and H. Richter
THEMA:
TGM
BISAC:
TEC021000
Details:
Selected, peer reviewed papers from the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009
Pages:
610
Year:
2010
ISBN-13 (softcover):
9783908451747
ISBN-13 (CD):
9783908454700
ISBN-13 (eBook):
9783038133698
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