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Gettering and Defect Engineering in Semiconductor Technology XIII
Subtitle:
GADEST 2009
Description:
This collection aims to address the fundamental aspects, as well as the technological problems, which are associated with defects in electronic materials and devices.
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Info:
eBook:
ToC:
Editors:
M. Kittler and H. Richter
THEMA:
TGM
BISAC:
TEC021000
Keywords:
Cathodoluminescence, Defect, Dislocation, DLTS, EBIC, Gettering, Grain Boundary, Implantation, Ion Implantation, IR-Spectroscopy, Multicrystalline Silicon, Oxygen, Oxygen Precipitation, Phosphorus Diffusion Gettering, Photoluminescence (PL), Silicon, Silicon Carbide (SiC), Simulation, Solar Cell, Vacancy
Details:
Selected, peer reviewed papers from the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009
Pages:
610
Year:
2010
ISBN-13 (softcover):
9783908451747
ISBN-13 (CD):
9783908454700
ISBN-13 (eBook):
9783038133698
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