Cathodoluminescence of SiO2/Si System

Abstract:

Article Preview

In this paper the new method for determination of luminescent centers concentration are discussed. While the possibility of electron traps determination and definition of its activation energy are suggested. The cathodoluminescent (CL) method was used. The determination of luminescent centers concentration in silicon oxide is based on the measurements of dependences of CL intensity on electron beam current. The presence and energy of activation of electron traps were studied by measurement of rise time and decay of luminescent band during the stationary irradiation of silica by electron beam.

Info:

Periodical:

Solid State Phenomena (Volumes 156-158)

Edited by:

M. Kittler and H. Richter

Pages:

487-492

DOI:

10.4028/www.scientific.net/SSP.156-158.487

Citation:

M.V. Zamoryanskaya "Cathodoluminescence of SiO2/Si System", Solid State Phenomena, Vols. 156-158, pp. 487-492, 2010

Online since:

October 2009

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.