Theoretical Study of Ionized Impurities in Silicon Nanowire MOS Transistors

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Abstract:

This study presents ionized impurity impacts on silicon nanowire MOS transistors. We calculate the current characteristics with a self-consistent three-dimensional (3D) Green’s function approach and show the effects of both acceptor and donor impurities on the physical electron properties. In particular, we emphasize that the presence of a donor induces different transport phenomena according to the applied gate bias. Our results show that the influence of a single impurity strongly depends on its position and induces high transistor performance variability with current modifications from 50% to two orders of magnitude.

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Solid State Phenomena (Volumes 156-158)

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511-516

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October 2009

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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