XBIC Investigation of the Grain Boundaries in Multicrystalline Si on the Laboratory X-Ray Source
It is shown that the X-ray beam induced current method (XBIC) can be realized at the laboratory X-ray source using the polycapillary x-ray optics. The images of iron contaminated grain boundaries in multicrystalline Si are obtained. It is shown that the grain boundary XBIC contrast is 2-3 times smaller than the EBIC one. A simulation of XBIC and EBIC contrast values for two-dimensional defects is carried out and a good correlation between the experimental and calculated values is obtained. The dependence of grain boundary XBIC contrast on the X-ray beam width is calculated.
W. Jantsch and F. Schäffler
R. R. Fahrtdinov et al., "XBIC Investigation of the Grain Boundaries in Multicrystalline Si on the Laboratory X-Ray Source", Solid State Phenomena, Vols. 178-179, pp. 226-229, 2011